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DEPTH PROFILE ANALYSIS OF POROUS SI FILM BY ERDA USING A DELTA-E-E DETECTOR TELESCOPE
Authors:
AVASTHI DK HUI SK SUBRAMANIYAM ET MEHTA BR
Citation:
Dk. Avasthi et al., DEPTH PROFILE ANALYSIS OF POROUS SI FILM BY ERDA USING A DELTA-E-E DETECTOR TELESCOPE, Vacuum, 47(9), 1996, pp. 1061-1064
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