Authors: GOTO S SUGISHIMA K BAN Y

Citation: S. Goto et al., LITHOGRAPHY FOR MICROELECTRONICS, Radiation physics and chemistry, 45(3), 1995, pp. 333-348

Authors: KONDO K NAKABAYASHI M KAWAKAMI K CHIJIMATSU T NAKAISHI M YAMADA M YAMABE M SUGISHIMA K

Citation: K. Kondo et al., STRESS STABILIZATION OF BETA-TANTALUM AND ITS CRYSTAL-STRUCTURE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(6), 1993, pp. 3067-3071

Authors: KONDO K NAKAISHI M YAMADA M YAMABE M SUGISHIMA K

Citation: K. Kondo et al., STRESS STABILIZATION OF TANTALUM ABSORBERS ON X-RAY MASKS, Microelectronic engineering, 21(1-4), 1993, pp. 75-78