ACNP - Italian Periodicals Catalogue

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Results: 1-9 |

Results: 9

RADIOFREQUENCY DISCHARGE BENCHMARK MODEL COMPARISON

Authors: SURENDRA M

Citation: M. Surendra, RADIOFREQUENCY DISCHARGE BENCHMARK MODEL COMPARISON, Plasma sources science & technology, 4(1), 1995, pp. 56-73

A MONTE-CARLO COLLISION MODEL FOR THE PARTICLE-IN-CELL METHOD - APPLICATIONS TO ARGON AND OXYGEN DISCHARGES

Authors: VAHEDI V SURENDRA M

Citation: V. Vahedi et M. Surendra, A MONTE-CARLO COLLISION MODEL FOR THE PARTICLE-IN-CELL METHOD - APPLICATIONS TO ARGON AND OXYGEN DISCHARGES, Computer physics communications, 87(1-2), 1995, pp. 179-198

ACROSS WAFER ETCH RATE UNIFORMITY IN A HIGH-DENSITY PLASMA REACTOR - EXPERIMENT AND MODELING

Authors: SURENDRA M GUARNIERI CR SELWYN GS DALVIE M

Citation: M. Surendra et al., ACROSS WAFER ETCH RATE UNIFORMITY IN A HIGH-DENSITY PLASMA REACTOR - EXPERIMENT AND MODELING, Applied physics letters, 66(18), 1995, pp. 2415-2417

REACTIVE ION ETCHING LAG INVESTIGATION OF OXIDE ETCHING IN FLUOROCARBON ELECTRON-CYCLOTRON-RESONANCE PLASMAS

Authors: JOUBERT O OEHRLEIN GS SURENDRA M ZHANG Y

Citation: O. Joubert et al., REACTIVE ION ETCHING LAG INVESTIGATION OF OXIDE ETCHING IN FLUOROCARBON ELECTRON-CYCLOTRON-RESONANCE PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1957-1961

FLUOROCARBON HIGH-DENSITY PLASMA .6. REACTIVE ION ETCHING LAG MODEL FOR CONTACT HOLE SILICON DIOXIDE ETCHING IN AN ELECTRON-CYCLOTRON-RESONANCE PLASMA

Authors: JOUBERT O OEHRLEIN GS SURENDRA M

Citation: O. Joubert et al., FLUOROCARBON HIGH-DENSITY PLASMA .6. REACTIVE ION ETCHING LAG MODEL FOR CONTACT HOLE SILICON DIOXIDE ETCHING IN AN ELECTRON-CYCLOTRON-RESONANCE PLASMA, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 665-670

COLLISIONLESS ELECTRON HEATING BY RADIOFREQUENCY PLASMA SHEATHS

Authors: SURENDRA M VENDER D

Citation: M. Surendra et D. Vender, COLLISIONLESS ELECTRON HEATING BY RADIOFREQUENCY PLASMA SHEATHS, Applied physics letters, 65(2), 1994, pp. 153-155

MOMENT ANALYSIS OF RF PARALLEL-PLATE-DISCHARGE SIMULATIONS USING THE PARTICLE-IN-CELL WITH MONTE-CARLO COLLISIONS TECHNIQUE

Authors: SURENDRA M DALVIE M

Citation: M. Surendra et M. Dalvie, MOMENT ANALYSIS OF RF PARALLEL-PLATE-DISCHARGE SIMULATIONS USING THE PARTICLE-IN-CELL WITH MONTE-CARLO COLLISIONS TECHNIQUE, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 48(5), 1993, pp. 3914-3924

DETECTION OF PARTICLE TRAPS BY SPATIALLY-RESOLVED OPTICAL-EMISSION SPECTROSCOPY OVER GROOVED ELECTRODES IN RADIO-FREQUENCY DISCHARGES

Authors: DALVIE M SELWYN GS SURENDRA M GUARNIERI CR MCGILL JJ

Citation: M. Dalvie et al., DETECTION OF PARTICLE TRAPS BY SPATIALLY-RESOLVED OPTICAL-EMISSION SPECTROSCOPY OVER GROOVED ELECTRODES IN RADIO-FREQUENCY DISCHARGES, Applied physics letters, 63(24), 1993, pp. 3279-3281

SELF-CONSISTENT FLUID MODELING OF RADIO-FREQUENCY DISCHARGES IN 2 DIMENSIONS

Authors: DALVIE M SURENDRA M SELWYN GS

Citation: M. Dalvie et al., SELF-CONSISTENT FLUID MODELING OF RADIO-FREQUENCY DISCHARGES IN 2 DIMENSIONS, Applied physics letters, 62(24), 1993, pp. 3207-3209

Risultati: 1-9 |