Authors: KANIA DR GAINES DP SWEENEY DS SOMMARGREN GE LAFONTAINE B VERNON SP TICHENOR DA BJORKHOLM JE ZERNIKE F KESTNER RN

Citation: Dr. Kania et al., PRECISION OPTICAL ASPHERES FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3706-3708