Authors:
WROBEL AM
WALKIEWICZPIETRZYKOWSKA A
STASIAK M
AOKI T
HATANAKA Y
SZUMILEWICZ J
Citation: Am. Wrobel et al., REACTIVITY OF ALKYLSILANES AND ALKYLCARBOSILANES IN ATOMIC HYDROGEN-INDUCED CHEMICAL-VAPOR-DEPOSITION, Journal of the Electrochemical Society, 145(3), 1998, pp. 1060-1065