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Results:
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Results: 3
Capacitive microphone with low-stress polysilicon membrane and high-stresspolysilicon backplate
Authors:
Torkkeli, A Rusanen, O Saarilahti, J Seppa, H Sipola, H Hietanen, J
Citation:
A. Torkkeli et al., Capacitive microphone with low-stress polysilicon membrane and high-stresspolysilicon backplate, SENS ACTU-A, 85(1-3), 2000, pp. 116-123
Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure
Authors:
Ezer, Y Harkonen, J Arpiainen, S Sokolov, V Kuivalainen, P Saarilahti, J Kaitila, J
Citation:
Y. Ezer et al., Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure, PHYS SCR, T79, 1999, pp. 228-231
Capacitive silicon microphone
Authors:
Torkkeli, A Saarilahti, J Seppa, H Sipola, H Rusanen, O Hietanen, J
Citation:
A. Torkkeli et al., Capacitive silicon microphone, PHYS SCR, T79, 1999, pp. 275-278
Risultati:
1-3
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