Authors:
Saddow, SE
Schattner, TE
Brown, J
Grazulis, L
Mahalingam, K
Landis, G
Bertke, R
Mitchel, WC
Citation: Se. Saddow et al., Effects of substrate surface preparation on chemical vapor deposition growth of 4H-SiC epitaxial layers, J ELEC MAT, 30(3), 2001, pp. 228-234