Citation: Kl. Saenger et Ic. Noyan, Determination of processing damage in thin polycrystalline Ir films using Bragg-peak fringe analysis, J APPL PHYS, 89(6), 2001, pp. 3125-3131
Citation: Kl. Saenger et Da. Neumayer, Determination of Ir consumption during thermal oxidation and PbZrxTi1-xO3 processing using Bragg-peak fringe analysis, J APPL PHYS, 89(6), 2001, pp. 3132-3137
Authors:
Saenger, KL
Cabral, C
Duncombe, PR
Grill, A
Neumayer, DA
Citation: Kl. Saenger et al., Oxygen stoichiometry in PdOx and PdOx/Pt electrode layers during processing of ferroelectric and high-epsilon perovskites, J MATER RES, 15(4), 2000, pp. 961-966
Authors:
Cabral, C
Saenger, KL
Kotecki, DE
Harper, JME
Citation: C. Cabral et al., Optimization of Ta-Si-N thin films for use as oxidation-resistant diffusion barriers, J MATER RES, 15(1), 2000, pp. 194-198
Authors:
Baniecki, JD
Laibowitz, RB
Shaw, TM
Saenger, KL
Duncombe, PR
Cabral, C
Kotecki, DE
Shen, H
Lian, J
Ma, QY
Citation: Jd. Baniecki et al., Effects of annealing conditions on charge loss mechanisms in MOCVD Ba0.7Sr0.3TiO3 thin film capacitors, J EUR CERAM, 19(6-7), 1999, pp. 1457-1461
Authors:
Saenger, KL
Cabral, C
Lavoie, C
Rossnagel, SM
Citation: Kl. Saenger et al., Thermal stability and oxygen-loss characteristics of Pt(O) films prepared by reactive sputtering, J APPL PHYS, 86(11), 1999, pp. 6084-6087
Authors:
Kotecki, DE
Baniecki, JD
Shen, H
Laibowitz, RB
Saenger, KL
Lian, JJ
Shaw, TM
Athavale, SD
Cabral, C
Duncombe, PR
Gutsche, M
Kunkel, G
Park, YJ
Wang, YY
Wise, R
Citation: De. Kotecki et al., (Ba,Sr)TiO3 dielectrics for future stacked-capacitor DRAM, IBM J RES, 43(3), 1999, pp. 367-382