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Results: 1
Behaviour of implanted oxygen and nitrogen in halogen lamp annealed silicon
Authors:
Belogorokhov, AI Bublik, VT Scherbachev, KD Parkhomenko, YN Makarov, VV Danilin, AB
Citation:
Ai. Belogorokhov et al., Behaviour of implanted oxygen and nitrogen in halogen lamp annealed silicon, NUCL INST B, 147(1-4), 1999, pp. 320-326
Risultati:
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