Authors: Yuwono, B Schloesser, T Gschwandtner, A Innertsberger, G Grassl, A Olbrich, A Krautschneider, W

Citation: B. Yuwono et al., Reliability of ultrathin oxide and nitride films in the 1nm to 2nm range, MICROEL ENG, 48(1-4), 1999, pp. 51-54