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Results: 1
Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes
Authors:
Schropfer, G de Labachelerie, M Tellier, CR
Citation:
G. Schropfer et al., Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes, MICROSYST T, 5(4), 1999, pp. 194-199
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