Authors: Ina, H Sentoku, K Matsumoto, T Sumitani, H Suita, M

Citation: H. Ina et al., Alignment mark optimization to reduce tool- and wafer-induced shift for XRA-1000, JPN J A P 1, 38(12B), 1999, pp. 7065-7070

Authors: Sentoku, K Matsumoto, T

Citation: K. Sentoku et T. Matsumoto, Advanced synchrotron radiation stepper alignment system performance, J VAC SCI B, 16(6), 1998, pp. 3466-3470