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Results:
1-2
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Results: 2
Alignment mark optimization to reduce tool- and wafer-induced shift for XRA-1000
Authors:
Ina, H Sentoku, K Matsumoto, T Sumitani, H Suita, M
Citation:
H. Ina et al., Alignment mark optimization to reduce tool- and wafer-induced shift for XRA-1000, JPN J A P 1, 38(12B), 1999, pp. 7065-7070
Advanced synchrotron radiation stepper alignment system performance
Authors:
Sentoku, K Matsumoto, T
Citation:
K. Sentoku et T. Matsumoto, Advanced synchrotron radiation stepper alignment system performance, J VAC SCI B, 16(6), 1998, pp. 3466-3470
Risultati:
1-2
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