Authors: Lewis, A Shambrot, E Radko, A Lieberman, K Ezekiel, S Veinger, D Yampolski, G

Citation: A. Lewis et al., Failure analysis of integrated circuits beyond the diffraction limit: Contact mode near-field scanning optical microscopy with integrated resistance,capacitance, and UV confocal imaging, P IEEE, 88(9), 2000, pp. 1471-1479