Authors:
Lewis, A
Shambrot, E
Radko, A
Lieberman, K
Ezekiel, S
Veinger, D
Yampolski, G
Citation: A. Lewis et al., Failure analysis of integrated circuits beyond the diffraction limit: Contact mode near-field scanning optical microscopy with integrated resistance,capacitance, and UV confocal imaging, P IEEE, 88(9), 2000, pp. 1471-1479