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Citation: Dg. Shamiryan et al., Controllable change of porosity of 3-methylsilane low-k dielectric film, EL SOLID ST, 4(1), 2001, pp. F3-F5

Authors: Baklanov, MR Shamiryan, DG Tokei, Z Beyer, GP Conard, T Vanhaelemeersch, S Maex, K

Citation: Mr. Baklanov et al., Characterization of Cu surface cleaning by hydrogen plasma, J VAC SCI B, 19(4), 2001, pp. 1201-1211