Authors:
Huang, HS
Shiu, JS
Lin, SJ
Chou, JW
Lee, R
Chen, C
Hong, G
Citation: Hs. Huang et al., A modified capacitance-voltage method used for L-eff extraction and process monitoring in advanced 0.15 mu m complementary metal-oxide-semiconductor technology and beyond, JPN J A P 1, 40(3A), 2001, pp. 1222-1226