Authors: Zimmer, O Vetter, J Rackwitz, N Siemroth, P

Citation: O. Zimmer et al., Calculation and measurement of the time dependent erosion rate of electromagnetic steered rectangular arc cathodes, SURF COAT, 146, 2001, pp. 195-200

Authors: Siemroth, P Schulke, T

Citation: P. Siemroth et T. Schulke, Copper metallization in microelectronics using filtered vacuum arc deposition - principles and technological development, SURF COAT, 133, 2000, pp. 106-113

Authors: Witke, T Schuelke, T Schultrich, B Siemroth, P Vetter, J

Citation: T. Witke et al., Comparison of filtered high-current pulsed arc deposition (phi-HCA) with conventional vacuum arc methods, SURF COAT, 126(1), 2000, pp. 81-88

Authors: Schuelke, T Witke, T Scheibe, HJ Siemroth, P Schultrich, B Zimmer, O Vetter, J

Citation: T. Schuelke et al., Comparison of DC and AC arc thin film deposition techniques, SURF COAT, 121, 1999, pp. 226-232

Authors: Witke, T Siemroth, P

Citation: T. Witke et P. Siemroth, Deposition of droplet-free films by vacuum arc evaporation - Results and applications, IEEE PLAS S, 27(4), 1999, pp. 1039-1044