Authors: Antonova, T Bougrov, G Bougrova, A Choi, WK Goncharov, L Jung, HJ Koh, SK Kondranin, S Kralkina, E Sitin, E Obukhov, V

Citation: T. Antonova et al., Study of electron energy distribution functions (EEDFs) in three DC low-pressure plasma sources, JPN J A P 1, 37(12B), 1998, pp. 6906-6915