Authors: Erdelyi, M Bor, Z Wilson, WL Smayling, MC Tittel, FK

Citation: M. Erdelyi et al., Enhanced optical microlithography with a Fabry-Perot-based spatial filtering technique, APPL OPTICS, 39(7), 2000, pp. 1121-1129

Authors: Erdelyi, M Bor, B Wilson, WL Smayling, MC Tittel, FK

Citation: M. Erdelyi et al., Simulation of coherent multiple imaging by means of pupil-plane filtering in optical microlithography, J OPT SOC A, 16(8), 1999, pp. 1909-1914