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Characteristics of ion beams from a Penning source for focused ion beam applications
Authors: Guharay, SK Sokolovsky, E Orloff, J
Citation: Sk. Guharay et al., Characteristics of ion beams from a Penning source for focused ion beam applications, J VAC SCI B, 17(6), 1999, pp. 2779-2782
Characteristics of focused beam spots using negative ion beams from a compact surface plasma source and merits for new applications
Authors: Guharay, SK Sokolovsky, E Orloff, J
Citation: Sk. Guharay et al., Characteristics of focused beam spots using negative ion beams from a compact surface plasma source and merits for new applications, J VAC SCI B, 16(6), 1998, pp. 3370-3373
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