Authors:
Somervell, MH
Fryer, DS
Osborn, B
Patterson, K
Byers, J
Willson, CG
Citation: Mh. Somervell et al., Study of the fundamental contributions to line edge roughness in a 193 nm,top surface imaging system, J VAC SCI B, 18(5), 2000, pp. 2551-2559