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Results: 1
Characteristics of high deposition rate pin diodes from pure SiH4 and 10% dilution of SiH4 in H-2
Authors:
Estrada, M Cerdeira, A Pereyra, I Soto, BS
Citation:
M. Estrada et al., Characteristics of high deposition rate pin diodes from pure SiH4 and 10% dilution of SiH4 in H-2, IEEE NUCL S, 47(1), 2000, pp. 33-35
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