Authors:
Nakamura, S
Suzuki, K
Ataka, M
Fujita, H
Basrour, S
Soumann, V
Labachelerie, M
Daniau, W
Citation: S. Nakamura et al., An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives, MICROSYST T, 5(2), 1998, pp. 69-71