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Results:
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Results: 2
Process control of plasma polymerization in a large industrial reactor
Authors:
Spatenka, P Endres, HJ Krumeich, J Cook, RW
Citation:
P. Spatenka et al., Process control of plasma polymerization in a large industrial reactor, SURF COAT, 119, 1999, pp. 1228-1232
Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement
Authors:
Spatenka, P Vlcek, J Blazek, J
Citation:
P. Spatenka et al., Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement, VACUUM, 55(2), 1999, pp. 165-170
Risultati:
1-2
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