Authors:
Brown, KM
Shohet, JL
Booske, JH
Gearhart, SS
Liu, HL
Snodgrass, TG
Speth, RR
Citation: Km. Brown et al., An investigation of the effects of iron in p(+)n silicon diodes for simulated plasma source ion implantation studies, IEEE SEMIC, 12(4), 1999, pp. 452-456