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Results: 1
Nucleation and growth kinetics in semiconductor chemical vapor deposition - art. no. 041302
Authors:
Spitzmuller, J Fehrenbacher, M Rauscher, H Behm, RJ
Citation:
J. Spitzmuller et al., Nucleation and growth kinetics in semiconductor chemical vapor deposition - art. no. 041302, PHYS REV B, 6304(4), 2001, pp. 1302
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