Citation: E. Steinsland et al., Etch rates of (100), (111) and (110) single-crystal silicon in TMAH measured in situ by laser reflectance interferometry, SENS ACTU-A, 86(1-2), 2000, pp. 73-80
Authors:
Tittonen, I
Breitenbach, G
Kalkbrenner, T
Muller, T
Conradt, R
Schiller, S
Steinsland, E
Blanc, N
de Rooij, NF
Citation: I. Tittonen et al., Interferometric measurements of the position of a macroscopic body: Towards observation of quantum limits, PHYS REV A, 59(2), 1999, pp. 1038-1044
Citation: E. Steinsland et al., Laser reflectance interferometry for in situ determination of silicon etchrate in various solutions, J ELCHEM SO, 146(10), 1999, pp. 3890-3895