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Results: 3

Authors: Steinsland, E Finstad, T Hanneborg, A
Citation: E. Steinsland et al., Etch rates of (100), (111) and (110) single-crystal silicon in TMAH measured in situ by laser reflectance interferometry, SENS ACTU-A, 86(1-2), 2000, pp. 73-80

Authors: Tittonen, I Breitenbach, G Kalkbrenner, T Muller, T Conradt, R Schiller, S Steinsland, E Blanc, N de Rooij, NF
Citation: I. Tittonen et al., Interferometric measurements of the position of a macroscopic body: Towards observation of quantum limits, PHYS REV A, 59(2), 1999, pp. 1038-1044

Authors: Steinsland, E Finstad, T Hanneborg, A
Citation: E. Steinsland et al., Laser reflectance interferometry for in situ determination of silicon etchrate in various solutions, J ELCHEM SO, 146(10), 1999, pp. 3890-3895
Risultati: 1-3 |