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Citation: Sa. Abughazaleh et al., Null holographic test structures for the measurement of overlay and its statistical variation, IEEE SEMIC, 13(2), 2000, pp. 173-180

Authors: Seunarine, K Calton, DW Underwood, I Stevenson, JTM Gundlach, AM Begbie, M

Citation: K. Seunarine et al., Techniques to improve the flatness of reflective micro-optical arrays, SENS ACTU-A, 78(1), 1999, pp. 18-27

Authors: Walton, AJ Stevenson, JTM Haworth, LI Fallon, M Evans, PSA Ramsey, BJ Harrison, D

Citation: Aj. Walton et al., Characterisation of offset lithographic films using microelectronic test structures, IEICE TR EL, E82C(4), 1999, pp. 576-581