Authors: Stuer, C Van Landuyt, J Bender, H Rooyackers, R Badenes, G

Citation: C. Stuer et al., The use of convergent beam electron diffraction for stress measurements inshallow trench isolation structures, MAT SC S PR, 4(1-3), 2001, pp. 117-119

Authors: Stuer, C Van Landuyt, J Bender, H De Wolf, I Rooyackers, R Badenes, G

Citation: C. Stuer et al., Investigation by convergent beam electron diffraction of the stress aroundshallow trench isolation structures, J ELCHEM SO, 148(11), 2001, pp. G597-G601