Authors:
Stuer, C
Van Landuyt, J
Bender, H
Rooyackers, R
Badenes, G
Citation: C. Stuer et al., The use of convergent beam electron diffraction for stress measurements inshallow trench isolation structures, MAT SC S PR, 4(1-3), 2001, pp. 117-119
Authors:
Stuer, C
Van Landuyt, J
Bender, H
De Wolf, I
Rooyackers, R
Badenes, G
Citation: C. Stuer et al., Investigation by convergent beam electron diffraction of the stress aroundshallow trench isolation structures, J ELCHEM SO, 148(11), 2001, pp. G597-G601