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Results:
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Results: 2
Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma
Authors:
Bowden, MD Tabata, R Suanpoot, P Uchino, K Muraoka, K Noguchi, M
Citation:
Md. Bowden et al., Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma, J APPL PHYS, 90(5), 2001, pp. 2158-2161
A 13.56 MHz multicusp ion source for gaseous ion-beam production
Authors:
Boonyawan, D Suanpoot, P Vilaithong, T
Citation:
D. Boonyawan et al., A 13.56 MHz multicusp ion source for gaseous ion-beam production, SURF COAT, 112(1-3), 1999, pp. 314-317
Risultati:
1-2
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