Authors:
Vassiliev, VY
Lin, C
Fung, D
Hsieh, J
Sudijono, JL
Citation: Vy. Vassiliev et al., Properties and gap-fill capability of HPD-CVD phosphosilicate glass films for subquarter-micrometer ULSI device technology, EL SOLID ST, 3(2), 2000, pp. 80-83
Authors:
Garreau, Y
Aid, K
Sauvage-Simkin, M
Pinchaux, R
McConville, CF
Jones, TS
Sudijono, JL
Tok, ES
Citation: Y. Garreau et al., Stoichiometry and discommensuration on InxGa1-xAs/GaAs(001) reconstructed surfaces: A quantitative x-ray diffuse-scattering study, PHYS REV B, 58(24), 1998, pp. 16177-16185