Authors: Suh, SM Zachariah, MR Girshick, SL

Citation: Sm. Suh et al., Modeling particle formation during low-pressure silane oxidation: Detailedchemical kinetics and aerosol dynamics, J VAC SCI A, 19(3), 2001, pp. 940-951

Authors: Suh, SM Chung, CC Lee, SH

Citation: Sm. Suh et al., Discrete-time LQG/LTR dual-stage controller design in magnetic disk drives, IEEE MAGNET, 37(4), 2001, pp. 1891-1895

Authors: Girshick, SL Swihart, MT Suh, SM Mahajan, MR Nijhawan, S

Citation: Sl. Girshick et al., Numerical modeling of gas-phase nucleation and particle growth during chemical vapor deposition of silicon, J ELCHEM SO, 147(6), 2000, pp. 2303-2311