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THE EFFECT OF SUBSTRATE-TEMPERATURE ON OXYGEN ABSORPTION DURING SIMULTANEOUS ION-BOMBARDMENT AND AG DEPOSITION ON SI
Authors:
MICKUS A GALDIKAS A PRANEVICUS L TAMULEVICUS S
Citation:
A. Mickus et al., THE EFFECT OF SUBSTRATE-TEMPERATURE ON OXYGEN ABSORPTION DURING SIMULTANEOUS ION-BOMBARDMENT AND AG DEPOSITION ON SI, Vacuum, 47(1), 1996, pp. 57-60
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