Authors:
ISHIKAWA J
TSUJI H
TOYOTA Y
GOTOH Y
MATSUDA K
TANJYO M
SAKAI S
Citation: J. Ishikawa et al., NEGATIVE-ION IMPLANTATION TECHNIQUE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 7-12
Authors:
SAKAI S
GOTOH Y
TSUJI H
TOYOTA Y
ISHIKAWA J
TANJYO M
MATSUDA K
Citation: S. Sakai et al., THE CHARGING MECHANISM OF INSULATED ELECTRODE IN NEGATIVE-ION IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 43-47