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Results: 4

Authors: SAKAI S TAKAHASHI M TANJYO M MATSUDA K
Citation: S. Sakai et al., DEVELOPMENT OF AN ION-SOURCE FOR THE LOW-ENERGY ION-IMPLANTATION, Materials chemistry and physics, 54(1-3), 1998, pp. 44-48

Authors: MATSUDA K TANJYO M
Citation: K. Matsuda et M. Tanjyo, ION SOURCES FOR IMPLANTATION APPLICATION, Review of scientific instruments, 67(3), 1996, pp. 901-904

Authors: ISHIKAWA J TSUJI H TOYOTA Y GOTOH Y MATSUDA K TANJYO M SAKAI S
Citation: J. Ishikawa et al., NEGATIVE-ION IMPLANTATION TECHNIQUE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 7-12

Authors: SAKAI S GOTOH Y TSUJI H TOYOTA Y ISHIKAWA J TANJYO M MATSUDA K
Citation: S. Sakai et al., THE CHARGING MECHANISM OF INSULATED ELECTRODE IN NEGATIVE-ION IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 43-47
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