Authors:
TEERLINCK I
MERTENS PW
SCHMIDT HF
MEURIS M
HEYNS MM
Citation: I. Teerlinck et al., IMPACT OF THE ELECTROCHEMICAL PROPERTIES OF SILICON-WAFER SURFACES ONCOPPER OUTPLATING FROM HF SOLUTIONS, Journal of the Electrochemical Society, 143(10), 1996, pp. 3323-3327
Authors:
VERHAVERBEKE S
TEERLINCK I
VINCKIER C
STEVENS G
CARTUYVELS R
HEYNS MM
Citation: S. Verhaverbeke et al., THE ETCHING MECHANISMS OF SIO2 IN HYDROFLUORIC-ACID, Journal of the Electrochemical Society, 141(10), 1994, pp. 2852-2857