Authors: SCHILTZ A TERPAN JF AMBLARD G PANIEZ PJ

Citation: A. Schiltz et al., BOTTOM ANTIREFLECTIVE COATINGS FOR DUV LITHOGRAPHY - DETERMINATION OFOPTIMUM THERMAL-PROCESS CONDITIONS, Microelectronic engineering, 35(1-4), 1997, pp. 221-224

Authors: SCHILTZ A TERPAN JF BRUN S PANIEZ PJ

Citation: A. Schiltz et al., BOTTOM ANTIREFLECTIVE COATINGS - CONTROL OF THERMAL-PROCESSING, Microelectronic engineering, 30(1-4), 1996, pp. 283-286