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Citation: M. Bexell et al., CHARACTERIZATION OF AN INCHWORM PROTOTYPE MOTOR, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 322-329

Authors: LJUNGBERG K SODERBARG A TIENSUU AL JOHANSSON S THUNGSTROM G PETERSSON CS

Citation: K. Ljungberg et al., BURIED COBALT SILICIDE LAYERS IN SILICON CREATED BY WAFER BONDING, Journal of the Electrochemical Society, 141(10), 1994, pp. 2829-2833