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Results: 1
DEFECT CENTERS IN CHEMICAL-MECHANICAL POLISHED MOS OXIDES
Authors:
SHANEYFELT MR WARREN WL HETHERINGTON DL TIMON RP RESNICK PJ WINOKUR PS
Citation:
Mr. Shaneyfelt et al., DEFECT CENTERS IN CHEMICAL-MECHANICAL POLISHED MOS OXIDES, Microelectronic engineering, 28(1-4), 1995, pp. 71-74
Risultati:
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