Authors: DOMASHEVSKAYA EP MAKEEVA NN TEREKHOV VA SUROVTSEV IS TKACHEVA RI BOCHAROV SA

Citation: Ep. Domashevskaya et al., EFFECTS OF DIFFERENT TREATMENTS ON THE MOLECULAR COMPOSITION OF POLYIMIDE FILMS FOR INSULATION LAYERS IN VLSICS, Inorganic materials, 33(10), 1997, pp. 1026-1028