EFFECTS OF DIFFERENT TREATMENTS ON THE MOLECULAR COMPOSITION OF POLYIMIDE FILMS FOR INSULATION LAYERS IN VLSICS

Authors
DOMASHEVSKAYA EP MAKEEVA NN TEREKHOV VA SUROVTSEV IS TKACHEVA RI BOCHAROV SA
Citation
Ep. Domashevskaya et al., EFFECTS OF DIFFERENT TREATMENTS ON THE MOLECULAR COMPOSITION OF POLYIMIDE FILMS FOR INSULATION LAYERS IN VLSICS, Inorganic materials, 33(10), 1997, pp. 1026-1028
Citations number
4
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
33
Issue
10
Year of publication
1997
Pages
1026 - 1028
Database
ISI
SICI code
0020-1685(1997)33:10<1026:EODTOT>2.0.ZU;2-A
Abstract
Thin polyimide films on silicon were prepared. Their molecular composi tion and its changes upon thermal and plasmachemical treatments, pulse d irradiation, and introduction of different adhesives were studied by infrated absorption spectroscopy.