Authors:
ASHIDA H
TOMOTANI M
TAMURA T
MATSUURA K
GOTO Y
OTANI S
Citation: H. Ashida et al., EVALUATION OF ELECTRICAL-PROPERTIES AND SIMS PROFILES ON FORMING GAS(N-2-H-2) ANNEALED PT PZT/PT CAPACITORS/, Integrated ferroelectrics (Print), 21(1-4), 1998, pp. 97-105
Authors:
SUZUKI K
SUDO R
TADA Y
TOMOTANI M
FEUDEL T
FICHTNER W
Citation: K. Suzuki et al., COMPREHENSIVE ANALYTICAL EXPRESSION FOR DOSE-DEPENDENT ION-IMPLANTED IMPURITY CONCENTRATION PROFILES, Solid-state electronics, 42(9), 1998, pp. 1671-1678