Authors: ROMAN P STAFFA J FAKHOURI S BRUBAKER M RUZYLLO J TOREK K KAMIENIECKI E

Citation: P. Roman et al., SURFACE DOPANT CONCENTRATION MONITORING USING NONCONTACT SURFACE-CHARGE PROFILING, Journal of applied physics, 83(4), 1998, pp. 2297-2300

Authors: TOREK K RUZYLLO J GRANT R NOVAK R

Citation: K. Torek et al., REDUCED PRESSURE ETCHING OF THERMAL OXIDES IN ANHYDROUS HF ALCOHOLIC GAS-MIXTURES/, Journal of the Electrochemical Society, 142(4), 1995, pp. 1322-1326

Authors: MA Y GREEN ML TOREK K RUZYLLO J OPILA R KONSTADINIDIS K SICONOLFI D BRASEN D

Citation: Y. Ma et al., IN-SITU VAPOR-PHASE PREGATE OXIDE CLEANING AND ITS EFFECTS ON METAL-OXIDE-SEMICONDUCTOR DEVICE CHARACTERISTICS, Journal of the Electrochemical Society, 142(11), 1995, pp. 217-219

Authors: RUZYLLO J TOREK K DAFFRON C GRANT R NOVAK R

Citation: J. Ruzyllo et al., ETCHING OF THERMAL OXIDES IN LOW-PRESSURE ANHYDROUS HF CH3OH GAS-MIXTURE AT ELEVATED-TEMPERATURE/, Journal of the Electrochemical Society, 140(4), 1993, pp. 64-66