Authors:
MACHIDA K
KYURAGI H
AKIYA H
IMAI K
TOUNAI A
NAKASHIMA A
Citation: K. Machida et al., NOVEL GLOBAL PLANARIZATION TECHNOLOGY FOR INTERLAYER DIELECTRICS USING SPIN ON GLASS-FILM TRANSFER AND HOT-PRESSING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1093-1097