Authors: MACHIDA K KYURAGI H AKIYA H IMAI K TOUNAI A NAKASHIMA A

Citation: K. Machida et al., NOVEL GLOBAL PLANARIZATION TECHNOLOGY FOR INTERLAYER DIELECTRICS USING SPIN ON GLASS-FILM TRANSFER AND HOT-PRESSING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1093-1097