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Authors: TOWERY D FURY MA
Citation: D. Towery et Ma. Fury, CHEMICAL-MECHANICAL POLISHING OF POLYMER-FILMS, Journal of electronic materials, 27(10), 1998, pp. 1088-1094

Authors: STINE BE BONING DS CHUNG JE CAMILLETTI L KRUPPA F EQUI ER LOH W PRASAD S MUTHUKRISHNAN M TOWERY D BERMAN M KAPOOR A
Citation: Be. Stine et al., THE PHYSICAL AND ELECTRICAL EFFECTS OF METAL-FILL PATTERNING PRACTICES FOR OXIDE CHEMICAL-MECHANICAL POLISHING PROCESSES, I.E.E.E. transactions on electron devices, 45(3), 1998, pp. 665-679

Authors: BOHORQUEZ JH HOCK SW TOUSI SH TOWERY D
Citation: Jh. Bohorquez et al., PRINT CARTRIDGES FOR A LARGE-FORMAT COLOR INKJET DRAFTING PLOTTER, HEWLETT-PAC, 45(1), 1994, pp. 50-51
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