Authors: ROSENFIELD MG THOMSON MGR COANE PJ KWIETNIAK KT KELLER J KLAUS DP VOLANT RP BLAIR CR TREMAINE KS NEWMAN TH HOHN FJ

Citation: Mg. Rosenfield et al., ELECTRON-BEAM LITHOGRAPHY FOR ADVANCED DEVICE PROTOTYPING - PROCESS TOOL METROLOGY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2615-2620