Authors: YANKOV RA VOELSKOW M KREISSIG W KULIKOV DV PEZOLDT J SKORUPA W TRUSHIN YV KHARLAMOV VS TSIGANKOV DN

Citation: Ra. Yankov et al., HIGH-TEMPERATURE HIGH-DOSE IMPLANTATION OF N-SIC( AND AL+ IONS IN 6H), Technical physics letters, 23(8), 1997, pp. 617-620