Authors:
TSU DV
CHAO BS
OVSHINSKY SR
GUHA S
YANG J
Citation: Dv. Tsu et al., EFFECT OF HYDROGEN DILUTION ON THE STRUCTURE OF AMORPHOUS-SILICON ALLOYS, Applied physics letters, 71(10), 1997, pp. 1317-1319
Authors:
TSU DV
YOUNG RT
OVSHINSKY SR
KLEPPER CC
BERRY LA
Citation: Dv. Tsu et al., ION AND NEUTRAL ARGON TEMPERATURES IN ELECTRON-CYCLOTRON-RESONANCE PLASMAS BY DOPPLER-BROADENED EMISSION-SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 935-942
Authors:
ZUNIGASEGUNDO A
RUIZ F
VAZQUEZLOPEZ C
GONZALEZHERNANDEZ J
TORRESDELGADO G
TSU DV
Citation: A. Zunigasegundo et al., CHARACTERIZATION OF SIO2 LAYERS ON SI WAFERS USING ATOMIC-FORCE MICROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 2572-2576