ION AND NEUTRAL ARGON TEMPERATURES IN ELECTRON-CYCLOTRON-RESONANCE PLASMAS BY DOPPLER-BROADENED EMISSION-SPECTROSCOPY

Authors
TSU DV YOUNG RT OVSHINSKY SR KLEPPER CC BERRY LA
Citation
Dv. Tsu et al., ION AND NEUTRAL ARGON TEMPERATURES IN ELECTRON-CYCLOTRON-RESONANCE PLASMAS BY DOPPLER-BROADENED EMISSION-SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 935-942
Citations number
18
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
935 - 942
Database
ISI
SICI code
0734-2101(1995)13:3<935:IANATI>2.0.ZU;2-C