Dv. Tsu et al., ION AND NEUTRAL ARGON TEMPERATURES IN ELECTRON-CYCLOTRON-RESONANCE PLASMAS BY DOPPLER-BROADENED EMISSION-SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 935-942
Citations number
18
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films